Title:
単一の直角エンドブロック
Document Type and Number:
Japanese Patent JP2008533297
Kind Code:
A
Abstract:
A single, right-angled end-block is claimed for rotatably carrying a target in a sputtering apparatus. The end-block comprises all necessary means to drive, energise, bear and seal (coolant and gas) the target in the sputtering apparatus from the outside through a single opening in a wall or door. The right-angled end-block rotates the target around an axis of rotation that is parallel to the wall on which the target is mounted. By preference the end-block is situated below the target in order to allow easy drainage of the coolant.
Inventors:
Delato, Christo
De Boschel, Will Mart
De Bouvel, Johannes
La Peyre, Gregory
De Boschel, Will Mart
De Bouvel, Johannes
La Peyre, Gregory
Application Number:
JP2008500164A
Publication Date:
August 21, 2008
Filing Date:
February 23, 2006
Export Citation:
Assignee:
Baker Cart Advanced Coatings
International Classes:
C23C14/34
Domestic Patent References:
| JP2005520935A | 2005-07-14 | |||
| JPH06503855A | 1994-04-28 | |||
| JPH05504373A | 1993-07-08 | |||
| JP2002529600A | 2002-09-10 |
Foreign References:
| US5620577A | 1997-04-15 |
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Arihara Koichi
Matsushima Tetsuo