Title:
冷陰極圧力センサ
Document Type and Number:
Japanese Patent JP2008533657
Kind Code:
A
Abstract:
A cold cathode pressure sensor has gastight housing, an anode and a cathode arranged in the housing, and a radiation source directed to the cathode for igniting a cold cathode discharge. The housing has a test gas inlet and is at least partly made of glass. The radiation source is arranged outside the housing and irradiates the cathode through the housing glass. The radiation source substantially emits a radiation of a wavelength of more than 400 nm and less than 1,400 nm.
Inventors:
Daniel Wetzich
Rudolf Gerdau
Rudolf Gerdau
Application Number:
JP2008500171A
Publication Date:
August 21, 2008
Filing Date:
March 02, 2006
Export Citation:
Assignee:
Inficon GmbH
International Classes:
H01J41/06
Domestic Patent References:
| JP2001525060A | 2001-12-04 | |||
| JPH0743236A | 1995-02-14 | |||
| JPH0922678A | 1997-01-21 | |||
| JPH0772031A | 1995-03-17 | |||
| JPH0626967A | 1994-02-04 | |||
| JPH0521037A | 1993-01-29 | |||
| JPH0829283A | 1996-02-02 | |||
| JP2005019414A | 2005-01-20 | |||
| JP2001525060A | 2001-12-04 | |||
| JPH0743236A | 1995-02-14 | |||
| JPH0922678A | 1997-01-21 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Reinhard Einsel