Title:
可変密度走査関連出願の相互参照本出願は、2006年1月31日に出願された米国仮特許出願60/763,659の優先権を主張し、2006年11月28日に出願された、米国特許出願11/563,822(発明の名称「可変密度走査」)に関連しその優先権を主張するものであり、引用によりその全体を本明細書に包含する。
Document Type and Number:
Japanese Patent JP2009525466
Kind Code:
A
Abstract:
Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.
Inventors:
Procoche, Roger Bee.
Callahan, Roger Sea.
Callahan, Roger Sea.
Application Number:
JP2008552303A
Publication Date:
July 09, 2009
Filing Date:
November 30, 2006
Export Citation:
Assignee:
Asylum Research Corporation
International Classes:
G01Q10/06
Domestic Patent References:
| JPS61220261A | 1986-09-30 | |||
| JP2003329563A | 2003-11-19 | |||
| JPH09180666A | 1997-07-11 |
Foreign References:
| US20020157457A1 | 2002-10-31 | |||
| US20010038072A1 | 2001-11-08 | |||
| US4952857A | 1990-08-28 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki