Title:
ピラニ真空計の圧力フルレンジにわたる温度補償を向上する方法
Document Type and Number:
Japanese Patent JP2009525487
Kind Code:
A
Abstract:
A method and apparatus are provided for achieving nearly perfect temperature compensation of a heat-loss vacuum gauge over its full pressure range. A voltage is measured across a sensor leg, a sensor leg and a temperature compensating leg connected together in series, or a sensor leg and a fixed resistive leg coupled together in series. A voltage is also measured across a subleg of the temperature compensating leg. The temperature compensating leg may include a temperature sensitive subleg and a temperature stable subleg connected together in series. The sublegs may include one or more temperature sensitive and/or temperature stable elements. The measured voltages are combined to produce temperature independent pressure indications over a pressure range. Three-dimensional curve-fitting or similar techniques may be used to combine the measured voltages.
Inventors:
Borenstein Michael Dee
Application Number:
JP2008553262A
Publication Date:
July 09, 2009
Filing Date:
January 25, 2007
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
G01L21/12
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Masashi Noda
Kenro Tsutsumi