Title:
収差補正カソード・レンズ顕微鏡機器
Document Type and Number:
Japanese Patent JP2009528668
Kind Code:
A
Abstract:
An aberration-correcting microscopy instrument is provided. The instrument has a first magnetic deflector disposed for reception of a first non-dispersed electron diffraction pattern. The first magnetic deflector is also configured for projection of a first energy dispersed electron diffraction pattern in an exit plane of the first magnetic deflector. The instrument also has an electrostatic lens disposed in the exit plane of a first magnetic deflector, as well as a second magnetic deflector substantially identical to the first magnetic deflector. The second magnetic deflector is disposed for reception of the first energy dispersed electron diffraction pattern from the electrostatic lens. The second magnetic deflector is also configured for projection of a second non-dispersed electron diffraction pattern in a first exit plane of the second magnetic deflector. The instrument also has an electron mirror configured for correction of one or more aberrations in the second non-dispersed electron diffraction pattern. The electron mirror is disposed for reflection of the second non-dispersed electron diffraction pattern to the second magnetic deflector for projection of a second energy dispersed electron diffraction pattern in a second exit plane of the second magnetic deflector.
Inventors:
Trompe, Rudolph, M
Application Number:
JP2008557443A
Publication Date:
August 06, 2009
Filing Date:
February 14, 2007
Export Citation:
Assignee:
INTERNATIONAL BUSINESS MASCHINES CORPORATION
International Classes:
H01J37/285; H01J37/05; H01J37/252; H01J37/153
Domestic Patent References:
| JPH05205687A | 1993-08-13 | |||
| JPH11273610A | 1999-10-08 | |||
| JP2005228743A | 2005-08-25 | |||
| JP2001319612A | 2001-11-16 |
Attorney, Agent or Firm:
Takeshi Ueno
Tasaichi Tanae
Yoshihiro City
Hiroshi Sakaguchi
Tasaichi Tanae
Yoshihiro City
Hiroshi Sakaguchi