Title:
連続堆積ラインにおけるエッジ被覆
Document Type and Number:
Japanese Patent JP2009530500
Kind Code:
A
Abstract:
A continuous roll-to-roll deposition coating apparatus and a method to continuous coat an edge of a strip substrate are disclosed. The invention is aimed at accomplishing a hard and abrasion resistant coated metal strip with improved adhesion between a dense coating and the substrate.The deposition coating apparatus, comprises: a vacuum process chamber (114) including an etching zone (116) upstream of a deposition zone (118);at least one ion assisted etcher(120) in the etching zone; and at least one deposition apparatus (122) in the deposition zone,wherein the at least one deposition apparatus includes at least one target (124), wherein the strip substrate, in travelling through the vacuum process chamber, projects a first edge region (140) toward the at least one ion assisted etcher in the etching zone and projects the first edge region toward the target of the at least one deposition apparatus in the deposition zone, wherein the first edge region of the strip substrate includes at least a first angled surface (142) tapered from a first proximal position (144) toward a first distal position, the first proximal position closer to a centre region of the strip substrate than the first distal position, the first angled surface having a first surface normal (150), and wherein the target of the at least one deposition apparatus includes a target surface (126) having a target normal(128) and is angled with respect to the first angled surface so that the target normal intersects the first surface normal at an angle a, where a is greater than or equal to 90 degrees.
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| JPS59177370 | VACUUM DEPOSITION DEVICE |
| WO/2021/221673 | PLASMA ASSISTED PARYLENE DEPOSITION |
Inventors:
Stew sky, michael
Application Number:
JP2009501384A
Publication Date:
August 27, 2009
Filing Date:
March 02, 2007
Export Citation:
Assignee:
Sandvik Intellectual Property Actie Borag
International Classes:
C23C14/24
Domestic Patent References:
| JP2005095658A | 2005-04-14 | |||
| JPH07507600A | 1995-08-24 | |||
| JP2002038266A | 2002-02-06 |
Foreign References:
| WO2006027016A1 | 2006-03-16 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Hiroshi Kamematsu
Nakamura Asayuki
Nagasaka Tomoyasu
Takashi Ishida
Tetsuji Koga
Hiroshi Kamematsu
Nakamura Asayuki
Nagasaka Tomoyasu