Title:
サセプタ及びこれを備える半導体製造装置
Document Type and Number:
Japanese Patent JP2009530806
Kind Code:
A
Abstract:
A susceptor and a semiconductor manufacturing apparatus including the same are provided. A wafer is loaded on a susceptor and the susceptor includes at least one pocket whose bottom surface is inclined. The semiconductor manufacturing apparatus includes a reaction chamber, a heating unit that generates heat in the reaction chamber, a susceptor on which a wafer is loaded and that includes at least one pocket whose bottom surface is inclined, and a rotation shaft coupled with the susceptor.
Inventors:
Song, Hyukyun
Application Number:
JP2009500279A
Publication Date:
August 27, 2009
Filing Date:
March 09, 2007
Export Citation:
Assignee:
LG Innotek Co., Ltd
International Classes:
H01L21/683; C23C16/458
Domestic Patent References:
| JP2004207545A | 2004-07-22 | |||
| JPS5775738U | 1982-05-11 | |||
| JPH1074705A | 1998-03-17 | |||
| JP2001518238A | 2001-10-09 |
Attorney, Agent or Firm:
Sakaki Morishita