Title:
基板照明・検査装置
Document Type and Number:
Japanese Patent JP2009535782
Kind Code:
A
Abstract:
A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic is held at an angle from a surface normal to avoid reflective artifacts from the specular surface of the substrate. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge. The plurality of lights can modulate color and intensity of light to enhance inspection of the substrate for defects.
Inventors:
Michael dee robins
Paul F Folder Hase
Joel Bee Bailey
Kevin Nguyen
Paul F Folder Hase
Joel Bee Bailey
Kevin Nguyen
Application Number:
JP2009509561A
Publication Date:
October 01, 2009
Filing Date:
March 15, 2007
Export Citation:
Assignee:
ACCRETECH USA, INC.
International Classes:
F21S2/00
Domestic Patent References:
| JP2003139523A | 2003-05-14 | |||
| JP2005337853A | 2005-12-08 | |||
| JPH0451610A | 1992-02-20 | |||
| JP2006017630A | 2006-01-19 | |||
| JP2000056136A | 2000-02-25 | |||
| JP2006047290A | 2006-02-16 | |||
| JP2006017689A | 2006-01-19 | |||
| JP2006030203A | 2006-02-02 | |||
| JP2003115388A | 2003-04-18 | |||
| JP2006084294A | 2006-03-30 |
Attorney, Agent or Firm:
Mitsue Obuchi
Yukio Fuse
Yukio Fuse