位置決め装置 - Koninklijke Philips Electronics N.V.

Title:

位置決め装置

Document Type and Number:

Japanese Patent JP2010508506

Kind Code:

A

Abstract:

A positioning device (11) comprises a stationary frame (2), and at least two scales (20, 30) for measuring the location of the platform with respect to the frame, the scales having mutually different pitches (P1; P2), and respective scanners (23, 33) providing respective scanner output signals (SM 1, SM2)—A controller (6) receiving both scanner output signals is capable to uniquely calculate the position (X) of the platform with respect to the frame in a measuring range (MR) that is larger than the largest of said two pitches (P1; P2).

Inventors:

Angelis Hellhosette
Fuchstra Peter
Defockert Helje Ay Jay

Application Number:

JP2009534030A

Publication Date:

March 18, 2010

Filing Date:

October 25, 2007

Export Citation:

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Assignee:

Koninklijke Philips Electronics N.V.

International Classes:

G01D5/244; B23Q17/22

Attorney, Agent or Firm:

Susumu Tsugaru
Akihiko Miyazaki
Fueda Shusen

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