Title:
ステッチされるICチップ・レイアウトの方法、システム、およびプログラム製品
Document Type and Number:
Japanese Patent JP2010519595
Kind Code:
A
Abstract:
Stitched integrated circuit (IC) chip layout methods, systems and program products are disclosed. In one embodiment, a method includes obtaining from a first entity a circuit design for an IC chip layout that exceeds a size of a photolithography tool field at a second entity, wherein the IC chip layout includes for at least one stitched region of a plurality of stitched regions: a boundary identification identifying a boundary of the at least one stitched region at which stitching occurs and a type indicator indicating whether the at least one stitched region is one of: redundant and unique; dissecting the IC chip layout into stitched regions indicated as unique or redundant at the second entity; and generating a photolithographic reticle at the second entity based on the plurality of stitched regions, the photolithographic reticle having a size that fits within the size of the photolithographic tool field at the second entity.
Inventors:
Dunham, Timothy, Gee
Reidy, Robert, Kay
Ogg, Kevin, N
Russell, Richard, J.
Shamgam, varachi, sea
Reidy, Robert, Kay
Ogg, Kevin, N
Russell, Richard, J.
Shamgam, varachi, sea
Application Number:
JP2009551027A
Publication Date:
June 03, 2010
Filing Date:
February 22, 2008
Export Citation:
Assignee:
INTERNATIONAL BUSINESS MASCHINES CORPORATION
International Classes:
G03F1/08; H01L21/027
Domestic Patent References:
| JPH10319570A | 1998-12-04 | |||
| JP2005037487A | 2005-02-10 | |||
| JP2000199973A | 2000-07-18 | |||
| JP2004342944A | 2004-12-02 | |||
| JP2000171965A | 2000-06-23 | |||
| JP2001092108A | 2001-04-06 | |||
| JPH0737801A | 1995-02-07 | |||
| JPH0645581A | 1994-02-18 | |||
| JP2001189254A | 2001-07-10 | |||
| JP2002118049A | 2002-04-19 | |||
| JPH10319570A | 1998-12-04 | |||
| JP2005037487A | 2005-02-10 | |||
| JP2000199973A | 2000-07-18 | |||
| JP2004342944A | 2004-12-02 | |||
| JP2000171965A | 2000-06-23 | |||
| JP2001092108A | 2001-04-06 | |||
| JPH0737801A | 1995-02-07 | |||
| JPH0645581A | 1994-02-18 |
Foreign References:
| WO2005103827A1 | 2005-11-03 |
Attorney, Agent or Firm:
Takeshi Ueno
Tasaichi Tanae
Yoshihiro City
Tasaichi Tanae
Yoshihiro City