Title:
プラズマ放電用電源装置、方法および光学膜
Document Type and Number:
Japanese Patent JP2011222292
Kind Code:
A5
Application Number:
JP2010090104
Publication Date:
May 23, 2013
Export Citation:
International Classes:
H05H1/24; C23C8/36; C23C16/503; H05H1/46