Title:
ボイドネットワークを有する化学機械的平坦化パッド
Document Type and Number:
Japanese Patent JP2011517111
Kind Code:
T
Inventors:
Wu Cancer way
Wells David Adam
Soe Oscar Kay.
Ciao Scott Singh
Matthew アヌープ
リフブル Pole
Wells David Adam
Soe Oscar Kay.
Ciao Scott Singh
Matthew アヌープ
リフブル Pole
Application Number:
JP2011503960T
Publication Date:
May 26, 2011
Filing Date:
August 04, 2008
Export Citation:
Assignee:
イノパッド, in condominium lei テッド
International Classes:
B24B37/00; B24D3/00; B24D3/32; H01L21/304
Attorney, Agent or Firm:
Nagoya international patent business corporation