Title:
光学照光装置及び方法
Document Type and Number:
Japanese Patent JP2011521269
Kind Code:
A
Abstract:
An optical system for detecting light from a 2D area of a sample (36) comprises a collection lens (34) for collecting light from a collection region of the sample. A light detector (44) is positionally fixed with respect to the sample, and a reflector arrangement (61) directs collected light to the detector.
The reflector arrangement comprises movable components and the collection lens (34) is movable relative to the sample. The collection lens and the movable components are configurable to define different collection regions, and the movement of the components effects a direction of the light from the collection region to a substantially unchanged area of the light detector (44). This arrangement avoids the need for a bulky detector in order to detect signals from a 2D sample area formed by scanning across the sample. This enables a more compact, cheaper and simpler solution.
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Inventors:
Fan Dyke Erik MHP
Hezeman's Cornelius A
Hezeman's Cornelius A
Application Number:
JP2011511122A
Publication Date:
July 21, 2011
Filing Date:
May 18, 2009
Export Citation:
Assignee:
Koninklijke Philips Electronics N.V.
International Classes:
G01N21/64
Domestic Patent References:
| JP2000121559A | 2000-04-28 | |||
| JP2001074656A | 2001-03-23 | |||
| JP2002162351A | 2002-06-07 | |||
| JP2004055071A | 2004-02-19 | |||
| JP2001194303A | 2001-07-19 | |||
| JP2005201911A | 2005-07-28 | |||
| JP2006349482A | 2006-12-28 | |||
| JP2006250908A | 2006-09-21 |
Foreign References:
| WO2008029730A1 | 2008-03-13 |
Attorney, Agent or Firm:
Susumu Tsugaru
Fueda Shusen
Yoshiyuki Yagabe
Fueda Shusen
Yoshiyuki Yagabe