Title:
アクチュエータおよび投影露光システム
Document Type and Number:
Japanese Patent JP2011528857
Kind Code:
A
Abstract:
An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.
Inventors:
Ulrich Weber
Stefan Hembacher
Armin Sheppach
Stefan Hembacher
Armin Sheppach
Application Number:
JP2011519055A
Publication Date:
November 24, 2011
Filing Date:
July 07, 2009
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B7/04; G03F7/20; H01L41/083; H01L41/09
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Attorney, Agent or Firm:
Kenji Sugimura
Tatsuya Sawada
Groundwork Kenichi
Tatsuya Sawada
Groundwork Kenichi