Login| Sign Up| Help| Contact|

Patent Searching and Data


Document Type and Number:
Japanese Patent JP2012194216
Kind Code:
A5
Application Number:
JP2011056136
Publication Date:
December 13, 2012
Export Citation:
Click for automatic bibliography generation   Help
International Classes:
G03F7/11; G03F7/038; G03F7/039; G03F7/075; H01L21/027; C08G79/00; C08G77/50; G03F7/30