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Title:
ミラー、リソグラフィ装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP2012500468
Kind Code:
A
Inventors:
Banier, Badim
Sumenaok, Leonide
Yakunin, Andrei, Mikhailovich
Application Number:
JP2011522457A
Publication Date:
January 05, 2012
Filing Date:
July 16, 2009
Export Citation:
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Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G02B5/08; G02B19/00
Domestic Patent References:
JP2004085915A2004-03-18
JP2005142569A2005-06-02
JP2006216917A2006-08-17
Foreign References:
WO2007105406A12007-09-20
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki



 
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