Title:
結像光学系
Document Type and Number:
Japanese Patent JP2012502490
Kind Code:
A
Abstract:
An imaging optical system includes a plurality of mirrors configured to image an object field in an object plane of the imaging optical system into an image field in an image plane of the imaging optical system. An illumination system includes such an imaging optical system. The transmission losses of the illumination system are relatively low.
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Inventors:
Manhans Jürgen
Schepach Armin
Zerner Johannes
Schepach Armin
Zerner Johannes
Application Number:
JP2011526392A
Publication Date:
January 26, 2012
Filing Date:
August 26, 2009
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B13/18; G02B17/06; G03F7/20
Domestic Patent References:
| JP2010510666A | 2010-04-02 | |||
| JP2000235144A | 2000-08-29 | |||
| JP2002116382A | 2002-04-19 | |||
| JP2009177184A | 2009-08-06 | |||
| JP2008153396A | 2008-07-03 | |||
| JP2005321565A | 2005-11-17 | |||
| JP2003233005A | 2003-08-22 | |||
| JP2003045782A | 2003-02-14 | |||
| JP2000100694A | 2000-04-07 | |||
| JP2000100694A | 2000-04-07 | |||
| JP2000235144A | 2000-08-29 | |||
| JP2002116382A | 2002-04-19 | |||
| JP2003045782A | 2003-02-14 | |||
| JP2003233005A | 2003-08-22 | |||
| JP2005072513A | 2005-03-17 | |||
| JP2005321565A | 2005-11-17 | |||
| JP2006253486A | 2006-09-21 | |||
| JP2008153396A | 2008-07-03 | |||
| JP2009177184A | 2009-08-06 | |||
| JP2010510666A | 2010-04-02 |
Foreign References:
| WO2009022506A1 | 2009-02-19 | |||
| WO2009022506A1 | 2009-02-19 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi