Title:
透明導電性亜鉛酸化物ディスプレイフィルム及びその製造方法
Document Type and Number:
Japanese Patent JP2012506486
Kind Code:
A
Abstract:
The present invention concerns a method for the generation of a transparent conductive oxide display coating (TCO display layer), in particular a transparent conductive oxide display coating as a transparent contact for flat panel displays and the like. The TCO display layer is generated by depositing zinc oxide and additionally aluminium, indium, gallium, boron, nitrogen, phosphorous, chlorine, fluorine or antimony or a combination thereof, with the process atmosphere containing hydrogen. These TCO layers can be realized in a particularly simple and cost-effective way compared to ITO. The properties of the inventive TCO layers are nearly as good as those for ITO, regarding high transmittance and low resistance.
Inventors:
Grau Oliver
Shriver wood
Shriver wood
Application Number:
JP2011532516A
Publication Date:
March 15, 2012
Filing Date:
October 05, 2009
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/34; C23C14/08; G09F9/30; H01B5/14; H01B13/00; H01L31/04
Domestic Patent References:
| JP2002363732A | 2002-12-18 | |||
| JP2003105533A | 2003-04-09 | |||
| JP2007154255A | 2007-06-21 | |||
| JPH05275727A | 1993-10-22 | |||
| JPS62190613A | 1987-08-20 | |||
| JP2004207383A | 2004-07-22 | |||
| JP2004296597A | 2004-10-21 | |||
| JP2007327079A | 2007-12-20 | |||
| JP2001007026A | 2001-01-12 |
Foreign References:
| WO1992018990A1 | 1992-10-29 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi