Title:
p型透明導電性薄膜の物理的蒸着法のためのターゲットの製造に用いる材料
Document Type and Number:
Japanese Patent JP2012511107
Kind Code:
A
Abstract:
The invention describes a powderous oxide material (MxM′y)Cu2+a O2+b for the production of targets for p-type transparent conductive thin films, wherein −0.2≰a≰0.2, −0.2≰b≰0.2 and either —M′ is Sr and M is either one or both of Ba and bivalent Cu, with x>0, y>0 and x+y=1 ±0.2; or —M is bivalent Cu, x=1 ±0.2, and y=0.
Inventors:
Hyde High Berefts
Fleet drace
Dawn foode
Michael nolan
Simon Dee. Elliott
Fleet drace
Dawn foode
Michael nolan
Simon Dee. Elliott
Application Number:
JP2011539926A
Publication Date:
May 17, 2012
Filing Date:
November 30, 2009
Export Citation:
Assignee:
Umicore S.A.
International Classes:
C23C14/34
Attorney, Agent or Firm:
Takuya Kuno
Toshio Yano
Takahashi
Kiyoshi Kuruma
Kimihiro Hoshi
Hiroyasu Ninomiya
Ryoichi Shino
Einzel Felix-Reinhard
Toshio Yano
Takahashi
Kiyoshi Kuruma
Kimihiro Hoshi
Hiroyasu Ninomiya
Ryoichi Shino
Einzel Felix-Reinhard