Title:
X線窓
Document Type and Number:
Japanese Patent JP2012516002
Kind Code:
A
Abstract:
A self-cleaning X-ray window arrangement is provided that includes a primary X-ray-transparent window element, separating an ambient pressure region from an intermediate region, and a secondary X-ray-transparent window element, separating the intermediate region from a reduced pressure region. A contaminant is expected to deposit on a side of the secondary element facing the reduced pressure region. A heat source is adapted to heat a portion of the secondary window element thereby evaporating contaminant. The secondary element shields the primary element from the reduced pressure region, in which contaminant is present, whereas the pressure-tight primary window element carries most of the differential pressure between the ambient pressure region and the reduced pressure region. Several features help to decrease the rate at which contaminant enters the intermediate region. By maintaining the pressure in the intermediate region close to the reduced pressure, the mechanical stress on the secondary window element can be limited as well as the exposure to harmful gases.
Inventors:
Hemberg, Oscar
Hertz, Hans
Tuo castor, tomi
Otendall, Michael
Hertz, Hans
Tuo castor, tomi
Otendall, Michael
Application Number:
JP2011546597A
Publication Date:
July 12, 2012
Filing Date:
January 26, 2009
Export Citation:
Assignee:
Excillum AB
International Classes:
H01J35/18; H01J35/08; H05G1/04
Domestic Patent References:
| JPS53134675U | 1978-10-25 | |||
| JPS549594A | 1979-01-24 | |||
| JPS6236546A | 1987-02-17 | |||
| JPH09509501A | 1997-09-22 | |||
| JPH08198687A | 1996-08-06 | |||
| JP2007533093A | 2007-11-15 | |||
| JP2000088999A | 2000-03-31 | |||
| JPH04363700A | 1992-12-16 |
Foreign References:
| WO2007133144A1 | 2007-11-22 |
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa