Title:
プラズマプロセスのためのグラウンドリターン
Document Type and Number:
Japanese Patent JP2012517076
Kind Code:
A
Abstract:
A method and apparatus for providing an electrically symmetrical ground or return path for electrical current between two electrodes is described. The apparatus includes at least on radio frequency (RF) device coupled to one of the electrodes and between a sidewall and/or a bottom of a processing chamber. The method includes moving one electrode relative to another and realizing a ground return path based on the position of the displaced electrode using one or both of a RF device coupled to a sidewall and the electrode, a RF device coupled to a bottom of the chamber and the electrode, or a combination thereof.
Inventors:
Choi, Su Yang
Tinner, Robin El.
Shinichi Kurita
White, John M.
Sorensen, Karl A.
Kor, Jeffrey A.
Anwar, Suhail
Furuta Manabu
Makoto Inagawa
Tinner, Robin El.
Shinichi Kurita
White, John M.
Sorensen, Karl A.
Kor, Jeffrey A.
Anwar, Suhail
Furuta Manabu
Makoto Inagawa
Application Number:
JP2011548432A
Publication Date:
July 26, 2012
Filing Date:
February 04, 2010
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H05H1/46; C23C16/509; H01L21/205; H01L21/31
Domestic Patent References:
| JP2006104575A | 2006-04-20 | |||
| JPH08186101A | 1996-07-16 | |||
| JPH03138372A | 1991-06-12 | |||
| JP2005123578A | 2005-05-12 | |||
| JPH10280142A | 1998-10-20 | |||
| JPH03240952A | 1991-10-28 | |||
| JP2006104575A | 2006-04-20 | |||
| JPH08186101A | 1996-07-16 | |||
| JPH03138372A | 1991-06-12 | |||
| JP2005123578A | 2005-05-12 | |||
| JPH10280142A | 1998-10-20 | |||
| JPH03240952A | 1991-10-28 |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori