Title:
クライオジェンフリー型冷却装置及び方法
Document Type and Number:
Japanese Patent JP2012520987
Kind Code:
A
Abstract:
A cryogen free cooling apparatus comprises a heat radiation shield (54, 10) surrounding a working region (20) and located in a vacuum chamber (4). A cryogen free cooling system has a cooling stage coupled to the heat radiation shield (54, 10). Aligned apertures (52, 56, 58) are provided in the heat radiation shield and vacuum chamber walls. A sample loading apparatus has a sample holding device (2) attached to one or more elongate probes (3) for inserting the sample holding device through the aligned apertures (25, 56, 58) to the working region (20). The sample holding device is releasably coupled for heat conduction via one or more thermal connector(s) to the heat radiation shield (54, 10) so as to pre-cool a sample (1) on or in the sample holding device before the sample holding device is inserted into the working region (20). The thermal connector(s) comprises one or more thermally conductive springs (31) fixed on the heat radiation shield or the sample holding device to make thermal contact between the heat radiation shield (54, 10) and the sample holding device (2).
Inventors:
Garside John
King Lee Simon
Closer gavin
Buhler matias
Vernike drain
King Lee Simon
Closer gavin
Buhler matias
Vernike drain
Application Number:
JP2012500303A
Publication Date:
September 10, 2012
Filing Date:
March 15, 2010
Export Citation:
Assignee:
Oxford Instruments Nanotechnology Tools Limited
International Classes:
F25D3/10; B01J3/00
Domestic Patent References:
| JPS6270461U | 1987-05-02 | |||
| JPH0444202A | 1992-02-14 | |||
| JP2011520087A | 2011-07-14 | |||
| JP2001255252A | 2001-09-21 | |||
| JP2008014878A | 2008-01-24 | |||
| JPS60260833A | 1985-12-24 | |||
| JP2008098415A | 2008-04-24 | |||
| JPH11162269A | 1999-06-18 |
Foreign References:
| US5611207A | 1997-03-18 | |||
| US0009027A | 1852-06-15 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa