Title:
EUVマイクロリソグラフィ用の照明光学系、この種の照明光学系用のEUV減衰器、及びこの種の照明光学系を有する照明系及び投影露光装置
Document Type and Number:
Japanese Patent JP2012522358
Kind Code:
A
Inventors:
Schmidt Nicholas
Hearties Joachim
Binger Ulrich
Punini Boaz
Hearties Joachim
Binger Ulrich
Punini Boaz
Application Number:
JP2012501137A
Publication Date:
September 20, 2012
Filing Date:
March 27, 2009
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B5/10; G02B7/182; G02B19/00
Domestic Patent References:
| JP2007500432A | 2007-01-11 | |||
| JP2006128321A | 2006-05-18 |
Foreign References:
| WO2004068564A1 | 2004-08-12 | |||
| US20080212059A1 | 2008-09-04 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi