Title:
軸方向力均衡手段を有する再生式真空ポンプ
Document Type and Number:
Japanese Patent JP2012527570
Kind Code:
A
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| JP2005194994 | TURBO VACUUM PUMP |
Inventors:
Scofield Nigel Paul
Liu Michael Chun Cow
Liu Michael Chun Cow
Application Number:
JP2012511349A
Publication Date:
November 08, 2012
Filing Date:
May 18, 2010
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04D23/00; F04D17/06
Domestic Patent References:
| JPH06173880A | 1994-06-21 | |||
| JP2008223553A | 2008-09-25 | |||
| JP2004116509A | 2004-04-15 | |||
| JP2004353647A | 2004-12-16 | |||
| JP2004060626A | 2004-02-26 | |||
| JPH03182697A | 1991-08-08 | |||
| JP2008175084A | 2008-07-31 |
Foreign References:
| WO1999007990A1 | 1999-02-18 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino