Title:
スペクトル純度フィルタ、リソグラフィ装置、及びスペクトル純度フィルタを製造する方法
Document Type and Number:
Japanese Patent JP2012531730
Kind Code:
A
Abstract:
A transmissive spectral purity filter configured to transmit extreme ultraviolet radiation includes a filter part having a plurality of apertures to transmit extreme ultraviolet radiation and to suppress transmission of a second type of radiation. The apertures may be manufactured in semiconductor material such as silicon by an anisotropic etching process. The semiconductor material is provided with a hydrogen-resistant layer, such as silicon nitride Si3N4, silicon dioxide SiO2, or silicon carbide SiC.
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Inventors:
Yakunin, Andrei
Vanine, Fadim
Guruskov, Dennis
Vanine, Fadim
Guruskov, Dennis
Application Number:
JP2012516602A
Publication Date:
December 10, 2012
Filing Date:
May 11, 2010
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G02B17/00; G02B19/00; G02B5/20
Attorney, Agent or Firm:
Sakaki Morishita