Document Type and Number:
Japanese Patent JP2013057526
Kind Code:
A5
Application Number:
JP2011194658A
Publication Date:
October 16, 2014
Export Citation:
International Classes:
H01L37/02; H01L27/146; G01J1/02; H01L27/144; H04N5/225; G01J5/48; G01J5/34