Document Type and Number:
Japanese Patent JP2013117067
Kind Code:
A5
Application Number:
JP2012214090
Publication Date:
October 15, 2015
Filing Date:
September 27, 2012
Export Citation:
International Classes:
C23C16/18; H01L21/28; H01L21/285; H01L21/8242; H01L27/108; C23C16/40; C23C16/455