Login| Sign Up| Help| Contact|

Patent Searching and Data


Document Type and Number:
Japanese Patent JP2013246021
Kind Code:
A5
Application Number:
JP2012119424
Publication Date:
June 11, 2015
Filing Date:
May 25, 2012
Export Citation:
Click for automatic bibliography generation   Help
International Classes:
G01J1/02; G01J5/48; H01L37/02