Title:
磁気記録媒体上にパターンを製造するためのシステム
Document Type and Number:
Japanese Patent JP2013503414
Kind Code:
A
Abstract:
An inline processing system for patterning magnetic recording layers on hard discs for use in a hard disc drive. Discs are processed on both sides simultaneously in a vertical orientation, in round plate-like holders called MDCs. A plurality (as many as 10) discs are held in a dial carrier of the MDC, and transferred from one process station to another. The dial carrier of the MDC may be rotated and/or angled at up to 70° from normal in each process station, so that one or a plurality of process sources may treat the discs simultaneously. This configuration provides time savings and a reduction in the number and size of process sources needed. A mask enhancement process for patterning of magnetic media, and a filling and planarizing process used therewith, are also disclosed.
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Inventors:
Palangepe Hidet
Loose Todo Arthur
Flemgen Roger P
Srinivasan Narasimhan
Luke Katrina
Dors Boris El
Ceral Adrian
Loose Todo Arthur
Flemgen Roger P
Srinivasan Narasimhan
Luke Katrina
Dors Boris El
Ceral Adrian
Application Number:
JP2012526978A
Publication Date:
January 31, 2013
Filing Date:
August 26, 2010
Export Citation:
Assignee:
Beeco Instruments Incorporated
International Classes:
G11B5/855; C23C14/56; G11B5/65; G11B5/82; G11B5/84; G11B5/85
Domestic Patent References:
| JPH0853752A | 1996-02-27 | |||
| JPH08274142A | 1996-10-18 | |||
| JPH11110756A | 1999-04-23 | |||
| JPH051378A | 1993-01-08 | |||
| JP2002540548A | 2002-11-26 |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Teppei Nakamura
Ayako Kaneko
Nozomi Yoshida
Shintaro Kanayama
Ori Akira
Teppei Nakamura
Ayako Kaneko
Nozomi Yoshida
Shintaro Kanayama