Title:
シルセスキオキサン樹脂の安定化
Document Type and Number:
Japanese Patent JP2013512994
Kind Code:
A
Abstract:
Disclosed is silsesquioxane resin composition that contains a free radical curable functional group that is stabilized with a hydrophilic inhibitor. The hydrophilic inhibitor that has the capability to scavenge free radicals such as ascorbic acid or salicylic acid is used to stabilize the resin. The resins are useful in semiconductor formation such as for anti-reflective coatings, hardmasks or photoresist layers.
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Inventors:
Andrew Macmillan
Eric Scott Moyer
Michael robert writer
Kasumi Takeuchi
One Shen
Craig Yakult
Eric Scott Moyer
Michael robert writer
Kasumi Takeuchi
One Shen
Craig Yakult
Application Number:
JP2012542120A
Publication Date:
April 18, 2013
Filing Date:
December 02, 2010
Export Citation:
Assignee:
DOW CORNING CORPORATION
International Classes:
C08L83/07; C08G77/20; C08K5/09; C08K5/1539
Domestic Patent References:
| JP2006219570A | 2006-08-24 | |||
| JP2006151975A | 2006-06-15 | |||
| JP2003206403A | 2003-07-22 | |||
| JPH10218995A | 1998-08-18 | |||
| JP2003226692A | 2003-08-12 | |||
| JP2008248239A | 2008-10-16 | |||
| JP2008256966A | 2008-10-23 | |||
| JP2010020109A | 2010-01-28 |
Foreign References:
| WO2009069465A1 | 2009-06-04 |
Attorney, Agent or Firm:
Kenji Sugimura
Kazuyuki Tomita
Kengo Yoshida
Kazuyuki Tomita
Kengo Yoshida