Title:
流体クロマトグラフィ向け拡散接合平面装置における圧力検出および流量制御
Document Type and Number:
Japanese Patent JP2013528801
Kind Code:
A
Abstract:
Flow through pressure sensors for use in fluid chromatography systems include a planar device formed from diffusion bonding of a plurality of metallic sheets and at least one sensing element. The planar device has a top surface, a bottom surface and a flow through channel. A diaphragm formed from a portion of one of the top or bottom surfaces is located adjacent to a sensing region of the flow through channel and is attached to the sensing element. The diaphragm is sized to deflect a distance in response to fluid pressure in the sensing region, which has an internal volume of less than about 25 microliters. The diaphragm and attached sensing element form a pressure sensor that measures strain or deflection of the diaphragm to calculate a pressure within the sensing region.
Inventors:
Banner, bernard
Gerhard, Jeff See
Droudville, Theodore A
Gerhard, Jeff See
Droudville, Theodore A
Application Number:
JP2013510264A
Publication Date:
July 11, 2013
Filing Date:
May 10, 2011
Export Citation:
Assignee:
Waters Technologies Corporation
International Classes:
G01N30/32; G01N30/62; G01N30/60
Domestic Patent References:
| JP2008500556A | 2008-01-10 | |||
| JP2009522550A | 2009-06-11 | |||
| JPH08313505A | 1996-11-29 |
Foreign References:
| WO2008106613A2 | 2008-09-04 | |||
| WO2009053915A1 | 2009-04-30 |
Attorney, Agent or Firm:
Kawaguchi International Patent Office