Title:
タッチパネルで使用される透明体を製造するための方法およびシステム
Document Type and Number:
Japanese Patent JP2013532231
Kind Code:
A
Abstract:
A process for manufacturing a transparent body for use in a touch panel is provided. The process includes: depositing a first transparent layer stack over a substrate with a first dielectric film, a second dielectric film, and a third dielectric film. The first and the third dielectric films have a low refractive index and the second dielectric film has a high refractive index. The process further includes depositing a transparent conductive film in a manner such that the first transparent layer stack and the transparent conductive film are disposed over the substrate in this order. At least one of the first dielectric film, the second dielectric film, the third dielectric film, or the transparent conductive film is deposited by sputtering of a rotatable target. Further thereto, a deposition apparatus for manufacturing a transparent body for use in a touch panel and a transparent body for use in a touch panel are provided.
Inventors:
Lots, Hans-Georg
Application Number:
JP2013517152A
Publication Date:
August 15, 2013
Filing Date:
June 15, 2011
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/08; B32B37/00
Domestic Patent References:
| JP2010069675A | 2010-04-02 | |||
| JP2010027567A | 2010-02-04 | |||
| JP2006268085A | 2006-10-05 | |||
| JP2005066937A | 2005-03-17 | |||
| JP2006524750A | 2006-11-02 | |||
| JP2005338047A | 2005-12-08 | |||
| JP4364938B1 | 2009-11-18 | |||
| JPH08240800A | 1996-09-17 |
Foreign References:
| WO1997008359A1 | 1997-03-06 |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori