Title:
化学機械平坦化に使用される固定研磨材の接合技法
Document Type and Number:
Japanese Patent JP2013533125
Kind Code:
A
Abstract:
An abrasive article includes a support pad, a first abrasive element, a second abrasive element and a fixation mechanism. The support pad has a first major surface, a second major surface, a first edge, a second edge and a channel. The channel is formed within the first major surface and extends from the first edge to the second edge. The first and second abrasive elements are each positionable over a portion of the support pad. The fixation mechanism is positioned within the channel ad secures an edge of the first abrasive element and an edge of the second abrasive element to the support pad.
Inventors:
Garialdi, John Jay.
Application Number:
JP2013515384A
Publication Date:
August 22, 2013
Filing Date:
June 08, 2011
Export Citation:
Assignee:
3M INNOVATIVE PROPERTIES COMPANY
International Classes:
B24D11/00; B24B37/11; H01L21/304
Domestic Patent References:
| JP2002252191A | 2002-09-06 | |||
| JP2004322232A | 2004-11-18 | |||
| JPH09277163A | 1997-10-28 | |||
| JP2002252191A | 2002-09-06 | |||
| JP2004322232A | 2004-11-18 | |||
| JPH11333703A | 1999-12-07 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Yasuki Yanagi
Yoshinori Shimizu
Yasuki Yanagi