Title:
多冷却器高速クライオポンプ
Document Type and Number:
Japanese Patent JP2013533454
Kind Code:
A
Abstract:
A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.
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Inventors:
Bartlett Allen Jay
Aircobat Michael J. Jr.
Sisoev Sergey
Aircobat Michael J. Jr.
Sisoev Sergey
Application Number:
JP2013522007A
Publication Date:
August 22, 2013
Filing Date:
July 29, 2011
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
F04B37/08; F25B9/14
Domestic Patent References:
| JPH1026427A | 1998-01-27 | |||
| JPS58500772A | 1983-05-12 | |||
| JPS603491A | 1985-01-09 |
Foreign References:
| US4966016A | 1990-10-30 | |||
| US4966016A | 1990-10-30 |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko