Title:
表面をコーティングするための方法および装置
Document Type and Number:
Japanese Patent JP2013536315
Kind Code:
A
Abstract:
The invention relates to a method for coating a surface (1) of a carrier material (2) with molecules (5, 6), said molecules (5, 6) being transferred from a molecular store (3, 4) into a gaseous state and ionised, the electrically charged molecules (5, 6), on the way to the surface, are subjected to at least one electric and/or magnetic field having at least one field component which is perpendicular to the targeted movement of the electrically charged molecules (5, 6), in order to exert targeted force perpendicular to the targeted movement of said electrically charged molecules (5, 6) onto the electrically charged molecules (5, 6). An electric and/or magnetic focusing device (8), for example a quadrupole field, acts upon the targeted movement of the electrically charged molecules (5, 6) between the molecule store (3, 4) and the surface (1). A filter device (12) is arranged between the molecule store (3, 4) and the surface (1) such that only molecules (5, 6) having a predetermined mass-charge ratio can reach the surface (1) through the filter device (12). The electrically charged molecules (5, 6) are prevented from impacting the surface (1) for predetermined periods of time by means of suitable electric and/or magnetic fields or means of temporally changeable filter devices (14). This enables the structured coating of the surface to take place.
Inventors:
St Essel, Philip
Heil, Holger
Spriter, Hubert
Schubach, Bernhard
Dasen Block, Johannes
Heil, Holger
Spriter, Hubert
Schubach, Bernhard
Dasen Block, Johannes
Application Number:
JP2013515744A
Publication Date:
September 19, 2013
Filing Date:
May 18, 2011
Export Citation:
Assignee:
Merck Patent Game Behr
International Classes:
C23C14/32; H01J27/24; H01J37/05; H01J37/08; H01J37/317; H01L51/50; H05B33/10
Domestic Patent References:
| JP2004169129A | 2004-06-17 | |||
| JP2004232044A | 2004-08-19 | |||
| JP2003166050A | 2003-06-13 |
Attorney, Agent or Firm:
Kurata Masatoshi
Yoshihiro Fukuhara
Makoto Nakamura
Nobuhisa Nogawa
Toshio Shirane
Takashi Mine
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Yoshihiro Fukuhara
Makoto Nakamura
Nobuhisa Nogawa
Toshio Shirane
Takashi Mine
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori