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Patent Searching and Data


Document Type and Number:
Japanese Patent JP2014074559
Kind Code:
A5
Application Number:
JP2012222863
Publication Date:
July 02, 2015
Filing Date:
October 05, 2012
Export Citation:
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International Classes:
F27D17/00; H01L21/22; H01L35/30; H01L21/027; H01L21/324; H01L21/02; H01L35/28



 
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