Title:
OPTICAL INTEGRATOR, ILLUMINATION UNIT, TRANSMISSION OPTICAL SYSTEM, ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2014123600
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transmission optical system capable of stably guiding a light flux having substantially uniform intensity distribution to a spatial light modulator even when output distribution of a power source is changed.SOLUTION: A transmission optical system comprises: an optical integrator including a plurality of wavefront splitting elements arranged in parallel; and a condenser optical system for superimposing a plurality of light fluxes wavefront-split by the optical integrator on an action face of the spatial light modulator. Each of the wavefront splitting elements includes: a first optical surface of a cylindrical surface shape having a positive refractive power with respect to a first direction; a second optical surface of a cylindrical surface shape arranged at a back side of the first optical surface and having a positive refractive power with respect to a second direction; and a third optical surface arranged at a back side of the second optical surface, having a positive refractive power with respect to the first direction and having a positive refractive power with respect to the second direction. A focal distance of the optical integrator with respect to the first direction is larger than a focal distance with respect to the second direction.
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Inventors:
KANAYAMATANI NOBUMICHI
Application Number:
JP2012277868A
Publication Date:
July 03, 2014
Filing Date:
December 20, 2012
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B3/00; G02B19/00; G03F7/20
Domestic Patent References:
| JP2002116379A | 2002-04-19 | |||
| JPH1020236A | 1998-01-23 | |||
| JPH08339954A | 1996-12-24 | |||
| JP2011507293A | 2011-03-03 | |||
| JP2011503835A | 2011-01-27 |
Attorney, Agent or Firm:
Takao Yamaguchi