Title:
CHUCK AND PROCESSING UNIT
Document Type and Number:
Japanese Patent JP2014130972
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a chuck which can fix and release a processed object easily.SOLUTION: A chuck 23 holds and fixes an elongated member as a processed object 10. The chuck 23 has a spring 55 and can switch from a state where the processed object 10 can be fixed by an elastic force (fig. 5(a)) by applying a force to the spring 55 and deforming the spring 55, to a state where an elastic force is not applied to the processed object 10 (fig. 5(b)). The chuck 23 may be employed in an exposure device for irradiating the processed object with light, for example.
Inventors:
OTA NORIHIRO
Application Number:
JP2012289142A
Publication Date:
July 10, 2014
Filing Date:
December 28, 2012
Export Citation:
Assignee:
NIDEC READ CORP
International Classes:
H01L21/027; C25D1/00
Domestic Patent References:
| JP2002052085A | 2002-02-19 | |||
| JP2002178188A | 2002-06-25 | |||
| JP4572303B1 | 2010-11-04 |
Attorney, Agent or Firm:
Naomi Katsura River