ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE

Japanese Patent JP2014146660

A

PROBLEM TO BE SOLVED: To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.SOLUTION: An illumination optical device includes an optical integrator having a plurality of wavefront splitting elements arranged in parallel, a first optical member having a first refractive power distribution where the refractive power at a point on a first axis extending in a first direction changes periodically in the first direction, a second optical member having a second refractive power distribution of the same period as that of the first refractive power distribution, a third optical member having a third refractive power distribution where the refractive power at a point on a first axis changes periodically in the first direction, and a fourth optical member having a fourth refractive power distribution of the same period as that of the third refractive power distribution. The first and second optical members are configured rotatably about a predetermined axis parallel with the optical axis of the illumination optical device, and the third and fourth optical members are configured movably in a second direction transverse to the optical axis of the illumination optical device.

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INOUE KAORU

JP2013013471A

August 14, 2014

January 28, 2013

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NIKON CORP

H01L21/027; G02B5/00; G02B19/00; G03F7/20

Takao Yamaguchi

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