Title:
ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2014146718
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an illumination optical device which can adjust the pupil intensity distribution at each point on an irradiated surface to a required distribution, respectively.SOLUTION: An illumination optical device illuminating the irradiated surface with light from a light source includes an optical integrator having a plurality of wavefront splitting elements arranged parallelly on the first surface crossing the optical path of the illumination optical device, and a variable member for changing the direction of light incident to the first surface depending on the position in the first surface. The wavefront splitting element of the optical integrator is imparted with a required aberration so that the illumination distribution, formed on the irradiated surface by the light passed through the wavefront splitting element, changes depending on the change in the direction of the incident light.
Inventors:
KOMATSUDA HIDEKI
Application Number:
JP2013014925A
Publication Date:
August 14, 2014
Filing Date:
January 30, 2013
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00
Attorney, Agent or Firm:
Takao Yamaguchi