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Title:
METHOD FOR PRODUCING SINGLE PIECE MICRO-MACHINE CONSTITUTION PARTS HAVING AT LEAST TWO DIFFERENT FUNCTIONS IN HEIGHT DIRECTION
Document Type and Number:
Japanese Patent JP2014152400
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing micro-machine constitution parts with parts having at least two different functions in a height direction mountable at a lower cost as a single piece.SOLUTION: Provided is a method (1) for producing micro-machine constitution parts (31, 41, 61, 91) of a single piece having at least two functions in a height direction. The method (1) includes a combination of the LIGA process in a single height and direct machining of a deposit on a base material (2) by the LIGA process.

Inventors:
FUSSINGER ALEXANDRE
MARC STRANCZL
Application Number:
JP2014025135A
Publication Date:
August 25, 2014
Filing Date:
February 13, 2014
Export Citation:
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Assignee:
NIVAROX SA
International Classes:
C25D1/00
Domestic Patent References:
JP2007240416A2007-09-20
JP2007247067A2007-09-27
JP2012529377A2012-11-22
JP2011089168A2011-05-06
JP2012198041A2012-10-18
JP2007240416A2007-09-20
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa