Title:
MAGNETIC BEARING DEVICE AND VACUUM PUMP
Document Type and Number:
Japanese Patent JP2014152829
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of improving S/N ratio of displacement information in magnetic bearing control.SOLUTION: A magnetic bearing device comprises: a sinusoidal discrete value generation part 313 which generates a sinusoidal discrete value; a DA converter 31 which DA converts the sinusoidal discrete value and generates a carrier wave signal; sensors 71 to 73 which modulate the carrier wave signal in accordance with a support position of a rotor shaft 4 and output the modulation wave signal; an AD converter 34 which AD converts a modulation wave signal with a sampling frequency fs satisfying fc=(n+1/2) fs (n is an integer of 0 or more) and with predetermined timing (maximum peak position neighborhood and minimum peak position neighborhood) synchronized with the sinusoidal discrete value; and a demodulation calculation part 310 outputs a value d3 calculated by d3=(d1-d2)/2 as demodulated calculation result, based on a data value d1 in the maximum peak position neighborhood and a data value d2 in the minimum peak position neighborhood.
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Inventors:
OZAKI JUNICHIRO
Application Number:
JP2013021681A
Publication Date:
August 25, 2014
Filing Date:
February 06, 2013
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F16C32/04; F04D19/04
Domestic Patent References:
| JP2006308074A | 2006-11-09 | |||
| JP2011002464A | 2011-01-06 | |||
| JP2000060169A | 2000-02-25 | |||
| JP2001177919A | 2001-06-29 |
Attorney, Agent or Firm:
Fuyuki Nagai