Title:
LIGA-UV PROCESS FOR FABRICATING MULTILAYER METAL STRUCTURE HAVING ADJACENT LAYERS THAT ARE NOT ENTIRELY SUPERPOSED, AND STRUCTURE OBTAINED BY THE PROCESS
Document Type and Number:
Japanese Patent JP2014177711
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve problems of nonvertical growth of deposited metal and formation of bubbles above a resin when a second electrodeposited layer is not entirely superposed on a first layer.SOLUTION: A photoresist layer is applied on a metal substrate and heated; the layer is exposed through a mask to UV irradiation and developed by dissolving a part not photocured so as to obtain a mold; a first layer of metal or of an alloy is electrodeposited in an open part of the mold; the metal structure and the mold are levelled by machining so as to obtain a planar upper surface; and a metal basecoat layer is deposited on the entire upper surface. Then these steps are repeated. A second layer of metal or an alloy is electrodeposited in the open part of the mold; the multilayer metal structure thus obtained with a cured photoresist is detached from the substrate by interlayer delamination; the photoresist is separated so as to free the multilayer metal structure; and a portion of the metal basecoat layer which is not inserted between two electrodeposited metal layers is removed.
Inventors:
SAUCY CLEMENT
Application Number:
JP2014115476A
Publication Date:
September 25, 2014
Filing Date:
June 04, 2014
Export Citation:
Assignee:
ROLEX SA
International Classes:
C25D1/00; G04B13/02; G04B15/14
Domestic Patent References:
JPH0594937A | 1993-04-16 | |||
JPH08176757A | 1996-07-09 | |||
JPH08269764A | 1996-10-15 | |||
JP2004148519A | 2004-05-27 | |||
JP2000346878A | 2000-12-15 | |||
JP2004148519A | 2004-05-27 | |||
JP2000346878A | 2000-12-15 | |||
JPH0594937A | 1993-04-16 | |||
JPH08176757A | 1996-07-09 | |||
JPH08269764A | 1996-10-15 |
Foreign References:
WO1998015676A1 | 1998-04-16 | |||
WO1998015676A1 | 1998-04-16 |
Attorney, Agent or Firm:
The first international patent firm of a patent business corporation