Title:
TRANSFER DEVICE OF PLATE-LIKE OBJECT
Document Type and Number:
Japanese Patent JP2014194991
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transfer device of a plate-like object which suctions and holds the plate-like object in a non-contact manner regardless of the state of the plate-like object transferred by the transfer device because support means rotatably supports a non-contact type suction holder.SOLUTION: A transfer device of a plate-like object comprises: suction holding means 2 which suctions and holds the plate-like object W; and moving means which moves the suction holding means 2 from a first predetermined position to a second predetermined position. The suction holding means 2 includes: a base part 21 connected with the moving means; a non-contact type suction holder 22 which jets air to generate a negative pressure and thereby suctions the plate-like object W in a non-contact manner; and support means 23 which rotatably supports the non-contact type suction holder 22 on the base part 21.
Inventors:
GO TAKESHI
YAMADA SHIYOUJIRO
YAMADA SHIYOUJIRO
Application Number:
JP2013070659A
Publication Date:
October 09, 2014
Filing Date:
March 28, 2013
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/677; B23Q7/04; B65G49/07
Domestic Patent References:
| JP2010064159A | 2010-03-25 | |||
| JP2002127070A | 2002-05-08 | |||
| JP2012099755A | 2012-05-24 | |||
| JP2002280439A | 2002-09-27 | |||
| JPH04146092A | 1992-05-20 | |||
| JP2004235622A | 2004-08-19 |
Attorney, Agent or Firm:
Hiroaki Sakai