Title:
EUVリソグラフィ系
Document Type and Number:
Japanese Patent JP2014504448
Kind Code:
A
Abstract:
In this case, each of a plurality of the mirror elements generates an image of the monitor radiation source in an image plane assigned to the respective mirror elements, distances B between the image planes assigned to the mirror elements and the screen have a maximum distance, distances A between each of the plurality of mirror elements and the image plane assigned to it have a minimum distance, and the maximum distance B is less than half of the minimum distance A.
Inventors:
Dinger Udo
Vishmeier Lars
Hauf marx
Kellner Stephan
Grewig Igor
Degunter Marx
Vishmeier Lars
Hauf marx
Kellner Stephan
Grewig Igor
Degunter Marx
Application Number:
JP2013542413A
Publication Date:
February 20, 2014
Filing Date:
December 09, 2011
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
JP2008091907A | 2008-04-17 | |||
JP2010518595A | 2010-05-27 | |||
JP2007139773A | 2007-06-07 | |||
JP2006208380A | 2006-08-10 | |||
JP2004085955A | 2004-03-18 | |||
JP2009117671A | 2009-05-28 | |||
JP2008085326A | 2008-04-10 | |||
JP2010141071A | 2010-06-24 |
Foreign References:
WO2010102649A1 | 2010-09-16 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Yoshinori Kishi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Yoshinori Kishi