Title:
マイクロリソグラフィ投影露光装置の照明系
Document Type and Number:
Japanese Patent JP2014505368
Kind Code:
A
Inventors:
Degunter Marx
Application Number:
JP2013550758A
Publication Date:
February 27, 2014
Filing Date:
January 29, 2011
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B3/00; G02B3/06; G02B19/00; G03F7/20
Domestic Patent References:
| JP2011528173A | 2011-11-10 | |||
| JP2010537414A | 2010-12-02 | |||
| JP2008533728A | 2008-08-21 | |||
| JP2007505488A | 2007-03-08 | |||
| JP2008072129A | 2008-03-27 | |||
| JP2002359176A | 2002-12-13 | |||
| JP2011528173A | 2011-11-10 | |||
| JP2010537414A | 2010-12-02 | |||
| JP2008533728A | 2008-08-21 | |||
| JP2007505488A | 2007-03-08 | |||
| JP2008072129A | 2008-03-27 | |||
| JP2002359176A | 2002-12-13 |
Foreign References:
| WO2010006687A1 | 2010-01-21 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Yoshinori Kishi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Yoshinori Kishi