Title:
形状測定装置、形状測定方法、及び構造物の製造方法
Document Type and Number:
Japanese Patent JP2014509730
Kind Code:
A
Abstract:
A profile measuring apparatus includes: an irradiating unit which is configured to irradiate the measuring object with light from the light source to form a spotted pattern; a scanner which is configured to relatively scan the surface of the measuring object with the spotted pattern; a light receiver which includes a plurality of light-receiving pixels aligned to detect an image of the spotted pattern generated by the light irradiating the measuring object from a different direction different from an irradiation direction of the light irradiating the measuring object; a changing unit which is configured to change positions, at which signals utilized to detect a position of the image of the spotted pattern are obtained, according to the irradiation direction of the light; and a controller which is configured to calculate positional information of the measuring object based on the signals from the light-receiving pixels.
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Inventors:
Chiaki Yamada
Takashi Tanemura
Takashi Tanemura
Application Number:
JP2013544936A
Publication Date:
April 21, 2014
Filing Date:
March 29, 2012
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B11/24
Domestic Patent References:
| JP2009534969A | 2009-09-24 | |||
| JP2008098383A | 2008-04-24 | |||
| JPH08105721A | 1996-04-23 | |||
| JPH08145625A | 1996-06-07 | |||
| JP2002202221A | 2002-07-19 | |||
| JP2004151796A | 2004-05-27 |
Attorney, Agent or Firm:
Kijuro Kawakita
Masahiro Fujita
Masahiro Fujita