Title:
多元素ドープ酸化亜鉛薄膜、その製作方法及び応用
Document Type and Number:
Japanese Patent JP2014514442
Kind Code:
A
Abstract:
The invention relates to the semiconductor material manufacturing technical field. A multi-elements-doped zinc oxide film as well as manufacturing method and application in photo-electric devices thereof are provided. The manufacturing method comprises the following steps: (1) mixing the powder of Ga 2 O 3 , Al 2 O 3 , SiO 2 and ZnO according to the following percentage by mass: 0.5%¼10 % of Ga 2 O 3 , 0.5%¼5 % of Al 2 O 3 , 0.5 % ¼1.5 % of SiO 2 , and the residue of ZnO; (2)sintering the powder mixture as target material; (3) putting the target material into a magnetic sputtering chamber, evacuating, setting-up work pressure of 0.2Pa¼5Pa, introducing mixed gas of inert gas and hydrogen with a flow rate of 15sccm¼25sccm, adopting a sputtering power of 40W¼200W, and sputtering on the substrate to obtain the multi-elements-doped zinc oxide film.
Inventors:
Joe, Minjie
One, pin
Chen, Jishin
Juan, Hui
One, pin
Chen, Jishin
Juan, Hui
Application Number:
JP2014500228A
Publication Date:
June 19, 2014
Filing Date:
March 25, 2011
Export Citation:
Assignee:
Sea Young Lighting Technology Fun Co., Ltd.
International Classes:
C23C14/34; C04B35/453; C23C14/08; H01B5/14; H01B13/00
Domestic Patent References:
| JP2009228034A | 2009-10-08 | |||
| JP2000119062A | 2000-04-25 | |||
| JPH11236219A | 1999-08-31 | |||
| JPH11256320A | 1999-09-21 | |||
| JP2011009069A | 2011-01-13 | |||
| JP2009199812A | 2009-09-03 | |||
| JP2010519720A | 2010-06-03 | |||
| JP2002363732A | 2002-12-18 | |||
| JP2012049218A | 2012-03-08 | |||
| JP2009228034A | 2009-10-08 | |||
| JP2000119062A | 2000-04-25 | |||
| JPH11236219A | 1999-08-31 | |||
| JPH11256320A | 1999-09-21 | |||
| JP2011009069A | 2011-01-13 | |||
| JP2009199812A | 2009-09-03 | |||
| JP2010519720A | 2010-06-03 | |||
| JP2002363732A | 2002-12-18 | |||
| JP2012049218A | 2012-03-08 |
Foreign References:
| WO2009145152A1 | 2009-12-03 | |||
| US20100089623A1 | 2010-04-15 | |||
| WO2009145152A1 | 2009-12-03 | |||
| US20100089623A1 | 2010-04-15 |
Attorney, Agent or Firm:
Kimura Mitsuru
Takanori Mamoru
Taiji Morikawa
Amamiya Yasuhito
Kei Sakurada
Mie Hideki
Takanori Mamoru
Taiji Morikawa
Amamiya Yasuhito
Kei Sakurada
Mie Hideki