Title:
磁気軸受組立体
Document Type and Number:
Japanese Patent JP2014514519
Kind Code:
A
Abstract:
Stray magnetic fields created by non-symmetrical magnetisation of the permanent magnets in a rotating magnet array of a magnetic bearing assembly, when used in turbo molecular pumps, can cause significant problems to devices such as scanning electron microscopes. In order to minimise the stray fields, at least the dipole and quadrupole moments of each magnet in the array is first measured. The magnets in the array are then arranged relative to one another such that both the dipole and quadrupole moments are minimised, thus minimising the stray magnetic field when the magnet array rotates in the turbomolecular pump.
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Inventors:
Brewster Barry Dudley
Way andrew
Way andrew
Application Number:
JP2014509812A
Publication Date:
June 19, 2014
Filing Date:
May 04, 2012
Export Citation:
Assignee:
Edwards Limited
International Classes:
F16C32/04; H02K7/09
Domestic Patent References:
| JPH04219493A | 1992-08-10 | |||
| JPS57116933A | 1982-07-21 | |||
| JP2003532838A | 2003-11-05 | |||
| JPH04219493A | 1992-08-10 | |||
| JPS57116933A | 1982-07-21 | |||
| JP2003532838A | 2003-11-05 |
Foreign References:
| EP1477695A2 | 2004-11-17 | |||
| US6806605B1 | 2004-10-19 | |||
| EP1477695A2 | 2004-11-17 | |||
| US6806605B1 | 2004-10-19 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino