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Title:
底面反射防止コーティング組成物及びそれの方法
Document Type and Number:
Japanese Patent JP2014524942
Kind Code:
A
Inventors:
Takanori Kudo (United States of America and New Jersey 07921, Bedminster, Read Lane, 2002)
ディオセズ Albert Dee (United States of America and Pennsylvania 18902, a ドイレス town, a linker circle, 5421)
NG Edward W (United States of America and New Jersey 08502, Belle Mead, タッガート ドライヴ, 2602)
チャクラパニ スリニヴァサン (United States of America and New Jersey 08807, Bridgewater, the Teng Blok coat, 21)
パドマナバン muni ラスナ (United States of America and New Jersey 08807, the Dumont coat, 1)
Application Number:
JP2014514162A
Publication Date:
September 25, 2014
Filing Date:
June 05, 2012
Export Citation:
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Assignee:
AZ Electronic マテリアルズ U. S. A. Corporation (United States of America and New Jersey 08876, Somervile, a meister avenue, 70)
International Classes:
C09D201/06; C08F220/26; C09D7/12; C09D201/08; G03F7/095; G03F7/11; H01L21/027; C07C55/08; C07C59/52; C07C59/68; C07C65/03; C07C65/105; C07C211/63; C07C215/90; C07C309/42
Domestic Patent References:
JP2012508911A2012-04-12
JP2012510639A2012-05-10
JP2005514657A2005-05-19
JP2011502276A2011-01-20
JP2010515107A2010-05-06
JP2006048035A2006-02-16
JP2008501985A2008-01-24
JP2013507653A2013-03-04
JP2006507521A2006-03-02
JP2013530425A2013-07-25
JP2012508911A2012-04-12
JP2012510639A2012-05-10
JP2005514657A2005-05-19
JP2011502276A2011-01-20
JP2010515107A2010-05-06
JP2006048035A2006-02-16
JP2008501985A2008-01-24
JP2013507653A2013-03-04
JP2006507521A2006-03-02
JP2013530425A2013-07-25
Foreign References:
US20100119972A12010-05-13
US20030215736A12003-11-20
US20090104559A12009-04-23
US20060292485A12006-12-28
US5652297A1997-07-29
US20100119972A12010-05-13
US20030215736A12003-11-20
US20090104559A12009-04-23
US20060292485A12006-12-28
US5652297A1997-07-29
Attorney, Agent or Firm:
Mitsufumi Ezaki
Minoru Kajisawa
Yoshinori Uenishi
Ichiro Torayama



 
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